| BULLETIN
of the
POLISH ACADEMY of SCIENCES TECHNICAL SCIENCES |
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| Volume
55, Issue 3, September 2007
Electronics |
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| Aims&Scope, Subscription | Editors | Authors' guide | to read PDF files | mirror: http://fluid.ippt.gov.pl/~bulletin/ |
| pp 281 - 285 |
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ZnO thin film as methane sensor |
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| P. MITRA and A.K. MUKHOPADHYAY |
| Methane
(CH4) sensitivity of zinc oxide (ZnO) thin film has been studied in the present work. The sensor element comprises of a chemically fabricated ZnO semiconducting layer and a layer of palladium (Pd) as catalyst. The catalyst layer was formed on the surface of semiconducting ZnO following a wet chemical process from palladium chloride (PdCl2) solution. Fundamental features of a sensor element e.g. sensitivity, response time and recovery process has been studied. The effect of operating temperature on performance of the sensor material has been investigated and a choice of optimum temperature was made at around 200oC. The sensor element exhibited reasonable sensitivity of about 86% at this temperature in presence of 1 vol% methane (CH4) in air. |
| Key words: |
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thin film, palladium catalyst, ZnO, methane sensor |
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| Copyright
® Bulletin of the Polish Academy of Sciences: Technical Sciences
6 October 2007, site prepared by KZ |
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